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| surface metrology : : Roughness sensors |
· Mechanical sensors,
composed of a pivoting stylet fitted at one end with a diamond tip which rests on the surface to be analysed, and a system which measures the displacement of the arm. The measurement of the displacement most often uses an inductive principle : a ferrite core integral with the stylet is displaced in a two range winding coil, the conditioner of the sensor performing the excitation of the first coil by a 20 KHz sinisoidal signal and the synchronous detection of the signal induced on the second coil. |
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·Laser optic roughness sensors,
using the servo-control principle of compact disk heads. there are made up of an optical assembly which ensures the fixed focusing of a laser beam onto the surface and which projects the reflected beam onto four photodiodes, and by vertical diplacement system permitting the slaving of the focusing point. |
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· White light optic roughness sensors,
White light confocal optic sensors use the chromatic aberration of a lens. A white source is focused on the surface by an optical assembly which presents a strong chromatic aberration. The altitude of the surface is determined by a spectral analysis of the light reflected by this surface |
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· Triangulation optic sensors,
Their principle is founded on the measurement of the look angle of a laser beam projected onto the surface. |

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Description of the different
sensors used in MSM or OSM modular device :
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Sensor
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Mechanical
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Laser
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Confocal micro |
Confocal macro
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Triangulation
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Range
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± 750 µm
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± 500 µm
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300 µm
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24 mm
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± 18 mm
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Vertical resolution
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0,05 µm
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0,05 µm
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0,01 µm
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1.5 µm
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1 µm
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Spatial resolution
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1.25 to 10 µm
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2 µm
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2 µm
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100 µm
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250 µm
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Measurement principle
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LVDT
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Feed back lens position
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Chromatic lens |
Chromatic lens
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Triangulation
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